JPH0410689Y2 - - Google Patents
Info
- Publication number
- JPH0410689Y2 JPH0410689Y2 JP11629686U JP11629686U JPH0410689Y2 JP H0410689 Y2 JPH0410689 Y2 JP H0410689Y2 JP 11629686 U JP11629686 U JP 11629686U JP 11629686 U JP11629686 U JP 11629686U JP H0410689 Y2 JPH0410689 Y2 JP H0410689Y2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- chemical
- turntable
- semiconductor
- chemical solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 57
- 239000000126 substance Substances 0.000 claims description 38
- 238000010438 heat treatment Methods 0.000 claims description 22
- 238000004519 manufacturing process Methods 0.000 claims description 18
- 239000007788 liquid Substances 0.000 claims description 15
- 238000011282 treatment Methods 0.000 claims description 9
- 235000012431 wafers Nutrition 0.000 description 37
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 238000004140 cleaning Methods 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 238000003860 storage Methods 0.000 description 6
- 238000012993 chemical processing Methods 0.000 description 4
- 241000894006 Bacteria Species 0.000 description 3
- 230000003749 cleanliness Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000007664 blowing Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 239000008213 purified water Substances 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11629686U JPH0410689Y2 (en]) | 1986-07-29 | 1986-07-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11629686U JPH0410689Y2 (en]) | 1986-07-29 | 1986-07-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6322733U JPS6322733U (en]) | 1988-02-15 |
| JPH0410689Y2 true JPH0410689Y2 (en]) | 1992-03-17 |
Family
ID=31000752
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11629686U Expired JPH0410689Y2 (en]) | 1986-07-29 | 1986-07-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0410689Y2 (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013197114A (ja) * | 2012-03-15 | 2013-09-30 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
| US20200064198A1 (en) * | 2018-08-22 | 2020-02-27 | Mattson Technology, Inc. | Systems And Methods For Thermal Processing And Temperature Measurement Of A Workpiece At Low Temperatures |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4098908B2 (ja) * | 1999-01-29 | 2008-06-11 | 大日本スクリーン製造株式会社 | 基板処理装置及び基板処理方法 |
| KR100416590B1 (ko) | 2001-01-13 | 2004-02-05 | 삼성전자주식회사 | 반도체 웨이퍼 세정장치 및 이를 이용한 웨이퍼 세정방법 |
| JP5118176B2 (ja) * | 2002-05-28 | 2013-01-16 | 芝浦メカトロニクス株式会社 | スピン処理装置及びスピン処理方法 |
| US20230211436A1 (en) * | 2021-12-30 | 2023-07-06 | Semes Co., Ltd. | Apparatus for treating substrate and method for treating a substrate |
-
1986
- 1986-07-29 JP JP11629686U patent/JPH0410689Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013197114A (ja) * | 2012-03-15 | 2013-09-30 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
| US20200064198A1 (en) * | 2018-08-22 | 2020-02-27 | Mattson Technology, Inc. | Systems And Methods For Thermal Processing And Temperature Measurement Of A Workpiece At Low Temperatures |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6322733U (en]) | 1988-02-15 |
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